Title :
Miniaturized Flexible Temperature Sensor
Author :
Moser, Yves ; Gijs, Martin A M
Author_Institution :
Inst. of Microelectron. & Microsyst., Lausanne
Abstract :
We realize a flexible temperature sensor based on a micropatterned thin-film platinum resistor. The sensor is situated at the end of a 100-mum-wide and 7-cm-long probe. The latter consists of a biocompatible high-temperature-resistant polyimide (U-Varnish-S, UBE Industries, Tokyo, Japan) in which the platinum resistor and the electrical contact leads are embedded. The sensor is operational from 0degC up to 400degC and has a time constant of less than 80 ms. Such a sensor can potentially be used to characterize the thermo-ablation process of tumors using hot steam injection via a microtube.
Keywords :
microsensors; platinum; temperature sensors; thin film resistors; biocompatible high-temperature-resistant polyimide; electrical contact leads; hot steam injection; medical applications; micropatterned thin-film platinum resistor; microtube; miniaturized flexible temperature sensor; polyimide-based devices; size 100 mum; size 7 cm; temperature 0 C to 400 C; thermo-ablation process; tumors; Biosensors; Contacts; Platinum; Polyimides; Probes; Resistors; Sensor phenomena and characterization; Temperature sensors; Thermal sensors; Thin film sensors; High temperature sensor; polyimide; thin-film platinum resistor;
Journal_Title :
Microelectromechanical Systems, Journal of
DOI :
10.1109/JMEMS.2007.908437
