Title :
Vapor-Phase Self-Assembled Monolayers for Anti-Stiction Applications in MEMS
Author :
Zhuang, Yan Xin ; Hansen, Ole ; Knieling, Thomas ; Wang, Christian ; Rombach, Pirmin ; Lang, Walter ; Benecke, Wolfgang ; Kehlenbeck, Markus ; Koblitz, Jörn
Author_Institution :
Tech. Univ. of Denmark, Lyngby
Abstract :
We have investigated the anti-stiction performance of self-assembled monolayers (SAMs) that were grown in vapor phase from six different organosilane precursors: CF3(CF2)5(CH2)2SiCl3 (FOTS), CF3(CF2)5(CH2)2Si(OC2H5)3 (FOTES), CF3(CF2)5(CH2)2Si(CH3)Cl2 (FOMDS), CF3(CF2)5(CH2)2Si(CH3)2Cl (FOMMS), CF3(CF2)7(CH2)2SiCl3 (FDTS), and CH3(CH2)17(CH2)2SiCl3 (OTS). The SAM coatings that were grown on silicon substrates were characterized with respect to static contact angle, surface energy, roughness, nanoscale adhesive force, nanoscale friction force, and thermal stability. The best overall anti-stiction performance was achieved using FDTS as precursor for the SAM growth, but all coatings show good potential for solving in-use stiction problems in microelectromechanical systems devices.
Keywords :
micromechanical devices; monolayers; self-assembly; stiction; substrates; thermal stability; MEMS; anti-stiction applications; microelectromechanical systems; nanoscale adhesive force; nanoscale friction force; organosilane precursors; roughness; silicon substrates; static contact angle; surface energy; thermal stability; vapor-phase self-assembled monolayers; Coatings; Friction; Micromechanical devices; Microstructure; Nanoelectromechanical systems; Nanostructures; Self-assembly; Silicon; Thermal force; Thermal stability; Adhesion; anti-stiction; friction; self-assembled monolayer (SAM); thermal stability; vapor phase;
Journal_Title :
Microelectromechanical Systems, Journal of
DOI :
10.1109/JMEMS.2007.904342
