Title :
Integrated optical spectrum analyser using planar technology on oxidised silicon substrate
Author :
Valette, S. ; Lizet, J. ; Mottier, P. ; Jadot, J.P. ; Renard, S. ; Fournier, A. ; Grouillet, A.M. ; Gidon, P. ; Denis, H.
Author_Institution :
LETI/Commissariat Ã\xa0 l´Energie Atomique, Grenoble, France
Abstract :
We report, for the first time, the achievement of an integrated optical spectrum analyser on oxidised silicon substrate. This device uses an entire planar technology fully compatible with microelectronic processes.
Keywords :
elemental semiconductors; integrated optics; silicon; spectral analysers; Fresnel lens; integrated optical spectrum analyser; oxidised Si substrate; planar technology;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19830602
