DocumentCode :
989622
Title :
Connected box-units-based compact highly clean environment for cross-disciplinary experiments platform
Author :
Ishibashi, A. ; Kaiju, H. ; Yamagata, Y. ; Kawaguchi, N.
Author_Institution :
Lab. of Quantum Electron., Hokkaido Univ., Sapporo, Japan
Volume :
41
Issue :
13
fYear :
2005
fDate :
6/23/2005 12:00:00 AM
Firstpage :
735
Lastpage :
736
Abstract :
Analysis of achieving a clean environment in a connected box-units system is performed. By feedback of outlet air into the inlet of the box-unit, the steady-state airborne-particle-count in the system becomes independent of the ambient particle count and depends little on the particle-arrest efficiency of the filter. It is demonstrated that ISO 3 (209D Class 1) cleanliness in an inexpensive compact manner with the versatile extensive connected box-units system can be realised, no matter how dusty the ambient.
Keywords :
ISO standards; clean rooms; ISO 3; US Federal Standard 209D Class 1; ambient particle count; connected box-units; cross disciplinary experiments platform; highly clean environment; outlet air feedback; particle arrest efficiency; steady-state airborne-particle-count;
fLanguage :
English
Journal_Title :
Electronics Letters
Publisher :
iet
ISSN :
0013-5194
Type :
jour
DOI :
10.1049/el:20051053
Filename :
1459871
Link To Document :
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