• DocumentCode
    989622
  • Title

    Connected box-units-based compact highly clean environment for cross-disciplinary experiments platform

  • Author

    Ishibashi, A. ; Kaiju, H. ; Yamagata, Y. ; Kawaguchi, N.

  • Author_Institution
    Lab. of Quantum Electron., Hokkaido Univ., Sapporo, Japan
  • Volume
    41
  • Issue
    13
  • fYear
    2005
  • fDate
    6/23/2005 12:00:00 AM
  • Firstpage
    735
  • Lastpage
    736
  • Abstract
    Analysis of achieving a clean environment in a connected box-units system is performed. By feedback of outlet air into the inlet of the box-unit, the steady-state airborne-particle-count in the system becomes independent of the ambient particle count and depends little on the particle-arrest efficiency of the filter. It is demonstrated that ISO 3 (209D Class 1) cleanliness in an inexpensive compact manner with the versatile extensive connected box-units system can be realised, no matter how dusty the ambient.
  • Keywords
    ISO standards; clean rooms; ISO 3; US Federal Standard 209D Class 1; ambient particle count; connected box-units; cross disciplinary experiments platform; highly clean environment; outlet air feedback; particle arrest efficiency; steady-state airborne-particle-count;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:20051053
  • Filename
    1459871