Title :
Connected box-units-based compact highly clean environment for cross-disciplinary experiments platform
Author :
Ishibashi, A. ; Kaiju, H. ; Yamagata, Y. ; Kawaguchi, N.
Author_Institution :
Lab. of Quantum Electron., Hokkaido Univ., Sapporo, Japan
fDate :
6/23/2005 12:00:00 AM
Abstract :
Analysis of achieving a clean environment in a connected box-units system is performed. By feedback of outlet air into the inlet of the box-unit, the steady-state airborne-particle-count in the system becomes independent of the ambient particle count and depends little on the particle-arrest efficiency of the filter. It is demonstrated that ISO 3 (209D Class 1) cleanliness in an inexpensive compact manner with the versatile extensive connected box-units system can be realised, no matter how dusty the ambient.
Keywords :
ISO standards; clean rooms; ISO 3; US Federal Standard 209D Class 1; ambient particle count; connected box-units; cross disciplinary experiments platform; highly clean environment; outlet air feedback; particle arrest efficiency; steady-state airborne-particle-count;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:20051053