• DocumentCode
    989662
  • Title

    Micro-temperature sensor array with thin-film thermocouples

  • Author

    Park, J.-J. ; Taya, M.

  • Author_Institution
    Dept. of Mech. Eng., Univ. of Washington, WA, USA
  • Volume
    40
  • Issue
    10
  • fYear
    2004
  • fDate
    5/13/2004 12:00:00 AM
  • Firstpage
    599
  • Lastpage
    601
  • Abstract
    A micro-temperature sensor array with thin-film thermocouples (TFTCs) is developed. The TFTCs are made with T-type (copper-constantan) thermocouples to measure chip temperature distribution of electronic packaging. The sensor array of 150 nm thickness has 10×10 junctions within a 9×9 mm area.
  • Keywords
    arrays; electric sensing devices; electronics packaging; microsensors; temperature sensors; thermocouples; chip temperature distribution; copper constantan; electronic packaging; heat conduction; microtemperature sensor array; thermoelectric power; thin film thermocouples;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:20040387
  • Filename
    1300228
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=989662