• DocumentCode
    990248
  • Title

    New diffraction grating profiles in InP for DFB lasers and integrated optics

  • Author

    Westbrook, L.D. ; Nelson, A.W. ; Fiddyment, P.J.

  • Author_Institution
    British Telecom Research Laboratories, Ipswich, UK
  • Volume
    19
  • Issue
    25
  • fYear
    1983
  • Firstpage
    1076
  • Lastpage
    1077
  • Abstract
    A bilevel processing technique has been used to obtain sub-micrometer-period InP diffraction gratings. Novel cross-sectional grating profiles with depths of up to 4000 Ã… have been obtained which should facilitate the fabrication of more efficient Bragg devices.
  • Keywords
    III-V semiconductors; diffraction gratings; distributed feedback lasers; indium compounds; integrated optics; optical workshop techniques; semiconductor junction lasers; Bragg devices; DBR laser; DFB lasers; InP; bilevel processing technique; diffraction grating profiles; distributed Bragg reflector laser; distributed feedback laser; integrated optics; semiconductor lasers;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:19830730
  • Filename
    4248290
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=990248