DocumentCode
990355
Title
Assessment of millimetre-wave Si IMPATT material
Author
Hing, L.A. ; Curran, J.E.
Author_Institution
GEC Research Laboratories, Hirst Research Centre, Wembley, UK
Volume
19
Issue
25
fYear
1983
Firstpage
1091
Lastpage
1092
Abstract
Millimetre-wave Si double-drift IMPATTs require high doping levels. Under these circumstances it will be shown that the determination of the doping profile from C/V or VB measurements leads to erroneous results and that SRP profiling is the preferred method.
Keywords
IMPATT diodes; doping profiles; elemental semiconductors; silicon; MM wave IMPATT; SRP profiling; Si double drift IMPATT; doping profile;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:19830740
Filename
4248302
Link To Document