Title :
Reduction of surface scattering loss in polymer microrings using thermal-reflow technique
Author :
Chao, Chung-Yen ; Guo, L. Jay
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., Univ. of Michigan, Ann Arbor, MI, USA
fDate :
6/1/2004 12:00:00 AM
Abstract :
A thermal-reflow technique is used to greatly reduce surface roughness scattering loss in polymer microring devices. Smoother surfaces were achieved and verified by scanning electron microscopy. Reduction in surface roughness scattering was further supported by the loss measurement of both straight waveguides and microring resonators. The variance of surface roughness in a polymer microring device is estimated to decrease by 35-40 nm after the thermal-reflow treatment, corresponding to a loss reduction of ∼74 dB/cm.
Keywords :
light scattering; micro-optics; optical losses; optical polymers; optical resonators; optical waveguides; scanning electron microscopy; surface roughness; thermo-optical devices; thermo-optical effects; loss measurement; microring resonators; polymer microrings; polymer waveguide; scanning electron microscopy; straight waveguides; surface roughness scattering loss; surface roughness variance; surface scattering loss reduction; thermal-reflow technique; thermal-reflow treatment; Optical filters; Optical resonators; Optical scattering; Optical surface waves; Optical waveguides; Polymers; Rough surfaces; Surface roughness; Surface treatment; Waveguide junctions;
Journal_Title :
Photonics Technology Letters, IEEE
DOI :
10.1109/LPT.2004.827413
