Title :
A thermally tunable GaAlAs-GaAs micromachined optical filter with submillisecond tuning speed
Author :
Amano, Tetsuo ; Hino, T. ; Koyama, F. ; Arai, M. ; Matsutani, Akihiro
Author_Institution :
Microsystem Res. Center, Tokyo Inst. of Technol., Yokohama, Japan
fDate :
6/1/2004 12:00:00 AM
Abstract :
We fabricated a GaAlAs-GaAs thermally tunable vertical-cavity filter with a thermal strain control layer and heating element on a micromachined cantilever structure. We achieved a large negative temperature dependence of -0.79 nm/K for the vertical-cavity filter by loading a GaAs strain control layer. The tuning voltage is as low as 4.9 V for wavelength tuning of 18.1 nm. We examined the dynamic response of the thermally tunable micromachined GaAlAs-GaAs filter, exhibiting both rise time and fall time of below 100 μs.
Keywords :
III-V semiconductors; aluminium compounds; gallium compounds; micro-optics; micromachining; micromechanical devices; optical communication equipment; optical fabrication; optical filters; optical tuning; semiconductor devices; thermo-optical devices; 4.9 V; GaAlAs-GaAs; GaAlAs-GaAs thermally tunable vertical-cavity filter; GaAs; GaAs strain control layer; heating element; microelectromechanical system; micromachined cantilever structure; negative temperature dependence; submillisecond tuning; thermal strain control layer; thermally tunable GaAlAs-GaAs micromachined optical filter; tunable filters; tuning voltage; wavelength tuning; Distributed Bragg reflectors; Gallium arsenide; Heating; Laser tuning; Optical filters; Optical tuning; Strain control; Temperature dependence; Thermal force; Tunable circuits and devices;
Journal_Title :
Photonics Technology Letters, IEEE
DOI :
10.1109/LPT.2004.827110
