A prealigned process of integrating optical waveguides with microfluidic devices

Author

Lien, Victor ; Berdichevsky, Yevgeny ; Lo, Yu-Hwa

Author_Institution

Electr. & Comput. Eng. Dept., Univ. of California, La Jolla, CA, USA

Volume

16

Issue

6

fYear

2004

fDate

6/1/2004 12:00:00 AM

Firstpage

1525

Lastpage

1527

Abstract

We present a novel technology to monolithically integrate buried heterostructure waveguides with microfluidic channels in a prealigned manner. The fabrication process produced sealed microfluidic channels, low-loss waveguides, and excellent waveguide-channel alignment. The resultant device allows efficient optical coupling between the channels and the waveguides. Thus, the waveguides can both deliver the optical power and collect the emitted light.

Keywords

integrated optics; microfluidics; optical couplers; optical fabrication; optical losses; optical waveguides; buried heterostructure waveguides; efficient optical coupling; fabrication process; integrating optical waveguides; low-loss waveguides; microfluidic devices; monolithic integration; optical power; prealigned process; sealed microfluidic channels; waveguide-channel alignment; Biomedical optical imaging; Fluorescence; Integrated optics; Microfluidics; Optical device fabrication; Optical devices; Optical fibers; Optical sensors; Optical waveguides; Stimulated emission;

fLanguage

English

Journal_Title

Photonics Technology Letters, IEEE

Publisher

ieee

ISSN

1041-1135

Type

jour

DOI

10.1109/LPT.2004.826774

Filename

1300653