DocumentCode
991887
Title
In-the-lens secondary electron analyser for IC internal voltage measurements with electron beams
Author
Menzel, E. ; Buchanan, R.
Author_Institution
Applied Beam Technology Inc., Fremont, USA
Volume
20
Issue
10
fYear
1984
Firstpage
408
Lastpage
409
Abstract
A new analyser scheme for voltage measurements on integrated circuits is described. The analyser is built into the objective lens of a scanning electron microscope. It features small working distances, high voltage resolution capability, high transmission, and reduced sensitivity to measurement errors.
Keywords
electron probes; integrated circuit technology; scanning electron microscopy; secondary electron emission; voltage measurement; IC internal voltage measurements; electron beams; electron probe; high voltage resolution capability; in the lens analyser; integrated circuits; measurement errors; objective lens; scanning electron microscope; secondary electron analyser;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:19840282
Filename
4248731
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