• DocumentCode
    992342
  • Title

    High cleanliness of portable clean-unit-box to unite clean-unit system platforms (CUSPs) and CUSP units

  • Author

    Rahaman, Md D. ; Gomita, K. ; Kawaguchi, N. ; Kaiju, H. ; Kondo, K. ; Ishibashi, A.

  • Author_Institution
    Hokkaido Univ., Sapporo
  • Volume
    43
  • Issue
    24
  • fYear
    2007
  • Firstpage
    1356
  • Lastpage
    1357
  • Abstract
    As a platform for nano-science and technology, cleanliness in a compact and local clean environment, i.e. a portable clean-unit-box (CUP), is reported for establishing a large-scale network of an ultrahigh clean environment platform towards cross-disciplinary research. Analyses of experimental results indicate that the CUP has cleanliness of ISO class ~2, which is one order of magnitude better than the conventional wafer transportation cleanbox.
  • Keywords
    clean rooms; CUSP units; clean-unit system platforms; local clean environment; portable clean-unit-box; ultrahigh clean environment platform;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:20072096
  • Filename
    4390990
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=992342