Flexible a-Si:H Position-Sensitive Detectors

Author

Fortunato, E. ; Pereira, L. ; Águas, H. ; Ferreira, I. ; Martins, R.

Author_Institution

Dept. of Mater. Sci., New Univ. of Lisbon, Caparica, Portugal

Volume

93

Issue

7

fYear

2005

fDate

7/1/2005 12:00:00 AM

Firstpage

1281

Lastpage

1286

Abstract

Flexible and large area (5 mm ×80 mm with an active length of 70 mm) position-sensitive detectors (PSDs) deposited onto polymeric substrates (polyimide-Kapton VN) have been fabricated. The optimized structure presented is based on a heterojunction of amorphous silicon (a-Si:H)/ZnO:Al. The sensors were characterized by spectral response, photocurrent dependence as a function of light intensity, and position detection measurements. The set of data obtained on one-dimensional PSDs based on the heterojunction show excellent performances with a maximum spectral response of 0.12 A/W at 500 nm and a nonlinearity of ±10% over 70-mm length. The produced sensors present a nonlinearity higher than those ones produced on glass substrates, due to the different thermal coefficients exhibited by the polymer and the a-Si:H film. In order to prove this behavior, it was measured the defect density obtained by the constant photocurrent method on a-Si:H thin films deposited on polymeric substrates and bent with different radii of curvature.

Keywords

amorphous semiconductors; elemental semiconductors; hydrogen; photoconductivity; photodetectors; polymers; semiconductor heterojunctions; silicon; thin film devices; 500 nm; 70 mm; PSD; Si:H-ZnO:Al; amorphous silicon; heterojunction; light intensity; photocurrent dependence; photocurrent method; photodetectors; polyimide substrates; position detection measurement; position-sensitive detectors; spectral response; thermal coefficients; thin film; Amorphous silicon; Glass; Heterojunctions; Photoconductivity; Polymer films; Position measurement; Position sensitive particle detectors; Sensor phenomena and characterization; Substrates; Thermal sensors; Amorphous silicon (a-Si : H); heterojunction; photodetectors; polyimide substrates; position-sensitive detectors (PSDs); thin films;

fLanguage

English

Journal_Title

Proceedings of the IEEE

Publisher

ieee

ISSN

0018-9219

Type

jour

DOI

10.1109/JPROC.2005.850302

Filename

1461584