Title :
High-Performance Nanowire Electronics and Photonics and Nanoscale Patterning on Flexible Plastic Substrates
Author :
Mcalpine, Michael C. ; Friedman, Robin S. ; Lieber, Charles M.
Author_Institution :
Dept. of Chem. & Chem. Biol., Harvard Univ., Cambridge, MA, USA
fDate :
7/1/2005 12:00:00 AM
Abstract :
The introduction of an ambient-temperature route for integrating high-mobility semiconductors on flexible substrates could enable the development of novel electronic and photonic devices with the potential to impact a broad spectrum of applications. Here we review our recent studies demonstrating that high-quality single-crystal nanowires (NWs) can be assembled onto flexible plastic substrates under ambient conditions to create FETs and light-emitting diodes. We also show that polymer substrates can be patterned through the use of a room temperature nanoimprint lithography technique for the general fabrication of hundred-nanometer scale features, which can be hierarchically patterned to the millimeter scale and integrated with semiconductor NWs to make high-performance FETs. The key to our approach is the separation of the high-temperature synthesis of single-crystal NWs from room temperature solution-based assembly, thus enabling fabrication of single-crystal devices on virtually any substrate. Silicon NW FETs on plastic substrates display mobilities of 200 cm2-V-1-s-1, rivaling those of single-crystal silicon and exceeding those of state-of-the-art amorphous silicon and organic transistors currently used for flexible electronics. Furthermore, the generality of this bottom-up assembly approach suggests the integration of diverse nanoscale building blocks on a variety of substrates, potentially enabling far-reaching advances in lightweight display, mobile computing, and information storage applications.
Keywords :
amorphous semiconductors; field effect transistors; light emitting diodes; microassembling; nanolithography; nanowires; photonic crystals; polymers; substrates; FET; amorphous silicon; bottom-up assembly approach; flexible electronics; flexible plastic substrates; high-mobility semiconductors; high-temperature synthesis; information storage application; light-emitting diodes; lightweight display; microassembling; mobile computing; nanoimprint lithography technique; nanometer scale fabrication; nanoscale patterning; nanowire electronics; organic transistors; photonic devices; polymer substrates; single-crystal devices; single-crystal nanowires; Assembly; Displays; FETs; Fabrication; Light emitting diodes; Photonics; Plastics; Silicon; Substrates; Temperature; Flexible electronics; light-emitting diodes; nanoimprint lithography (NIL); nanoscale patterning; nanowire (NW) transistors; plastic substrates; silicon nanowires (NWs);
Journal_Title :
Proceedings of the IEEE
DOI :
10.1109/JPROC.2005.850308