Title :
Photodisplacement microscopy
Author :
Burov, J.I. ; Bransalov, K.P.
Author_Institution :
Sofia University, Faculty of Physics, Department of Solid State Physics, Sofia, Bulgaria
Abstract :
The photodisplacement microscopy for depth probing and control of a silicon plate cross-section homogenity is developed, as the one-arm optical bridge with interference Newton fringes is used. For determining the thickness of a silicon plate and for visualising its cross-section the frequency dependence of the thermal waves penetration depth is measured.
Keywords :
acoustic microscopes; acousto-optical effects; measurement by laser beam; nondestructive testing; thickness measurement; IC testing; NDT; Si plate; acoustic microscopes; acousto-optics; cross-section homogeneity control; depth probing; frequency dependence; interference Newton fringes; measurement by laser beam; nondestructive testing; one-arm optical bridge; photodisplacement microscopy; thermal waves penetration depth; thickness determination;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19840394
