DocumentCode
993250
Title
Monitoring the tilt angle of an ion-beam cross-section
Author
Szajnowski, W.J.
Author_Institution
University of Warsaw, Institute of Telecommunications Technical, Warsaw, Poland
Volume
20
Issue
14
fYear
1984
Firstpage
600
Lastpage
601
Abstract
A nondestructive method is presented to monitor the tilt angle of an elliptical cross-section of an ion beam. The desired information is extracted from random signals induced by the beam on four metal electrodes forming part of a flight tube.
Keywords
angular measurement; ion beams; ion implantation; cross section tilt angle measurement; elliptical cross-section; flight tube; four metal electrodes; ion implantation; ion-beam cross-section; monitoring; nondestructive method;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:19840414
Filename
4248893
Link To Document