Title :
Studies of large area silicon microstrip sensors
Author :
Tsay, Wen-Chin ; Hong, Jyh-Wong ; Chang, Y.H. ; Chen, A. ; Hou, S.R. ; Hsu, S.L. ; Lin, C.H. ; Lin, Willis T. ; Ting, Hsien-Jen ; Chiang, Song-Tsang ; Chuang, Emily ; Hwang, Su-Wen
Author_Institution :
Dept. of Electr. Eng., Nat. Central Univ., Chung-Li, Taiwan
fDate :
8/1/1995 12:00:00 AM
Abstract :
Aiming at future uses in large silicon tracking devices, 4×8 cm2 silicon microstrip sensors were fabricated, and the processes related to such sensors were studied. The fabrication of 4×8 cm2 silicon microstrip sensors on 100 mm wafers has become a routine procedure with a good yield rate. A 4×64 cm2 long ladder, assembled from eight pieces of 4×8 cm2 sensors, has been tested at the CERN SPS area. Test results show that such a detector is feasible
Keywords :
position sensitive particle detectors; silicon radiation detectors; CERN SPS area; Si; large area microstrip sensors; large tracking devices; Assembly; Circuit testing; Detectors; Gettering; Leakage current; Microstrip; P-n junctions; Resistors; Silicon; Strips;
Journal_Title :
Nuclear Science, IEEE Transactions on
