DocumentCode :
994058
Title :
Vertical Silicon membranes for super-Schottky diodes
Author :
Raley, N.F. ; Sugiyama, Y. ; Duzer, T. ; Raley, N. ; Sugiyama, Youhei ; Duzer, T.
Author_Institution :
University of California, Berkeley, California
Volume :
19
Issue :
3
fYear :
1983
fDate :
5/1/1983 12:00:00 AM
Firstpage :
507
Lastpage :
511
Abstract :
We have fabricated vertical silicon membranes in
Keywords :
Silicon materials/devices; Superconducting devices; Biomembranes; Detectors; Etching; Fabrication; Frequency; Laboratories; Lithography; Resists; Schottky diodes; Silicon;
fLanguage :
English
Journal_Title :
Magnetics, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9464
Type :
jour
DOI :
10.1109/TMAG.1983.1062375
Filename :
1062375
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=994058
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