Title :
Integrated optics processing: uses of an EDTA etch solution
Author :
Murphy, E.J. ; Minford, W.J. ; Rice, T.C.
Author_Institution :
AT&T Bell Laboratories, Allentown, USA
Abstract :
A new processing step with important implications in LiNbO3 waveguide device fabrication is reported. The combination of an EDTA solution and photomasking is used to etch titanium and form novel waveguide structures allowing local control of the propagation constant and optical mode profile. Several applications are discussed.
Keywords :
etching; integrated optics; lithium compounds; optical waveguides; titanium; EDTA etch solution; LiNbO3 waveguide device fabrication; Ti etching; applications; integrated optics processing; local control of optical mode profile; local control of propagation constant; optical waveguides; photomasking; processing step; waveguide structures;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19840517
