Title :
Integrated circuit quality optimization using surface integrals
Author :
Feldmann, Peter ; Director, Stephen W.
Author_Institution :
AT&T Bell Labs., Murray Hill, NJ, USA
fDate :
12/1/1993 12:00:00 AM
Abstract :
A novel formulation of the parametric yield as a surface integral on the boundary of the disturbance space acceptability region is introduced. This formulation allows the accurate and efficient estimation of yield via a Monte Carlo method which can also produce yield gradients with minimal overhead. The authors extend this formulation to a more general IC quality measure. A general IC quality optimization method, significantly more efficient than Taguchi´s, is introduced. This method can handle multiple performances and perform yield maximization as a special case. The optimization method is demonstrated on several circuit examples
Keywords :
Monte Carlo methods; optimisation; semiconductor process modelling; IC quality optimization; Monte Carlo method; disturbance space acceptability region; multiple performances; optimization method; parametric yield; surface integrals; yield gradients; yield maximization; Circuit synthesis; Fabrication; Fluctuations; Integral equations; Integrated circuit yield; Iterative algorithms; Manufacturing processes; Optimization methods; Profitability; Yield estimation;
Journal_Title :
Computer-Aided Design of Integrated Circuits and Systems, IEEE Transactions on