DocumentCode
994525
Title
Integrated circuit quality optimization using surface integrals
Author
Feldmann, Peter ; Director, Stephen W.
Author_Institution
AT&T Bell Labs., Murray Hill, NJ, USA
Volume
12
Issue
12
fYear
1993
fDate
12/1/1993 12:00:00 AM
Firstpage
1868
Lastpage
1879
Abstract
A novel formulation of the parametric yield as a surface integral on the boundary of the disturbance space acceptability region is introduced. This formulation allows the accurate and efficient estimation of yield via a Monte Carlo method which can also produce yield gradients with minimal overhead. The authors extend this formulation to a more general IC quality measure. A general IC quality optimization method, significantly more efficient than Taguchi´s, is introduced. This method can handle multiple performances and perform yield maximization as a special case. The optimization method is demonstrated on several circuit examples
Keywords
Monte Carlo methods; optimisation; semiconductor process modelling; IC quality optimization; Monte Carlo method; disturbance space acceptability region; multiple performances; optimization method; parametric yield; surface integrals; yield gradients; yield maximization; Circuit synthesis; Fabrication; Fluctuations; Integral equations; Integrated circuit yield; Iterative algorithms; Manufacturing processes; Optimization methods; Profitability; Yield estimation;
fLanguage
English
Journal_Title
Computer-Aided Design of Integrated Circuits and Systems, IEEE Transactions on
Publisher
ieee
ISSN
0278-0070
Type
jour
DOI
10.1109/43.251150
Filename
251150
Link To Document