• DocumentCode
    994525
  • Title

    Integrated circuit quality optimization using surface integrals

  • Author

    Feldmann, Peter ; Director, Stephen W.

  • Author_Institution
    AT&T Bell Labs., Murray Hill, NJ, USA
  • Volume
    12
  • Issue
    12
  • fYear
    1993
  • fDate
    12/1/1993 12:00:00 AM
  • Firstpage
    1868
  • Lastpage
    1879
  • Abstract
    A novel formulation of the parametric yield as a surface integral on the boundary of the disturbance space acceptability region is introduced. This formulation allows the accurate and efficient estimation of yield via a Monte Carlo method which can also produce yield gradients with minimal overhead. The authors extend this formulation to a more general IC quality measure. A general IC quality optimization method, significantly more efficient than Taguchi´s, is introduced. This method can handle multiple performances and perform yield maximization as a special case. The optimization method is demonstrated on several circuit examples
  • Keywords
    Monte Carlo methods; optimisation; semiconductor process modelling; IC quality optimization; Monte Carlo method; disturbance space acceptability region; multiple performances; optimization method; parametric yield; surface integrals; yield gradients; yield maximization; Circuit synthesis; Fabrication; Fluctuations; Integral equations; Integrated circuit yield; Iterative algorithms; Manufacturing processes; Optimization methods; Profitability; Yield estimation;
  • fLanguage
    English
  • Journal_Title
    Computer-Aided Design of Integrated Circuits and Systems, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0278-0070
  • Type

    jour

  • DOI
    10.1109/43.251150
  • Filename
    251150