• DocumentCode
    994610
  • Title

    Properties of NbN films crystallized from the amorphous state

  • Author

    Gavaler, J.R. ; Greggi, J. ; Wilmer, R. ; Ekin, J.W.

  • Author_Institution
    Westinghouse R&D Center, Pittsburgh, PA
  • Volume
    19
  • Issue
    3
  • fYear
    1983
  • fDate
    5/1/1983 12:00:00 AM
  • Firstpage
    418
  • Lastpage
    421
  • Abstract
    Cubic Bl structure NbN was prepared by annealing amorphous Nb-N films made by sputtering niobium in an argon-nitrogen atmosphere onto low temperature ( \\tilde{<} 350^{\\circ} C) substrates. Crystallized films on sapphire substrates have equiaxed grains while films on niobium are columnar. Grain sizes vary from 12.5 nm to > 100 nm. The highest superconducting critical properties measured in these films are: Tc= 16K, Jc(4.2K, zero field) = 8 × 105A/cm2, and Bc2(1.3K) = 28T. Data on the effect of uniaxial tensile strain on Jcshow that there is no measurable elastic (reversible) strain effect. Irreversible Jcdegradation begins at an intrinsic tensile strain of 1.3% in the best case.
  • Keywords
    Amorphous semiconductor materials/devices; Conducting films; Sputtering; Superconducting materials; Amorphous materials; Annealing; Atmosphere; Crystallization; Grain size; Niobium; Sputtering; Strain measurement; Superconducting films; Tensile strain;
  • fLanguage
    English
  • Journal_Title
    Magnetics, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9464
  • Type

    jour

  • DOI
    10.1109/TMAG.1983.1062421
  • Filename
    1062421