DocumentCode
994610
Title
Properties of NbN films crystallized from the amorphous state
Author
Gavaler, J.R. ; Greggi, J. ; Wilmer, R. ; Ekin, J.W.
Author_Institution
Westinghouse R&D Center, Pittsburgh, PA
Volume
19
Issue
3
fYear
1983
fDate
5/1/1983 12:00:00 AM
Firstpage
418
Lastpage
421
Abstract
Cubic Bl structure NbN was prepared by annealing amorphous Nb-N films made by sputtering niobium in an argon-nitrogen atmosphere onto low temperature (
C) substrates. Crystallized films on sapphire substrates have equiaxed grains while films on niobium are columnar. Grain sizes vary from 12.5 nm to > 100 nm. The highest superconducting critical properties measured in these films are: Tc = 16K, Jc (4.2K, zero field) = 8 × 105A/cm2, and Bc2 (1.3K) = 28T. Data on the effect of uniaxial tensile strain on Jc show that there is no measurable elastic (reversible) strain effect. Irreversible Jc degradation begins at an intrinsic tensile strain of 1.3% in the best case.
C) substrates. Crystallized films on sapphire substrates have equiaxed grains while films on niobium are columnar. Grain sizes vary from 12.5 nm to > 100 nm. The highest superconducting critical properties measured in these films are: TKeywords
Amorphous semiconductor materials/devices; Conducting films; Sputtering; Superconducting materials; Amorphous materials; Annealing; Atmosphere; Crystallization; Grain size; Niobium; Sputtering; Strain measurement; Superconducting films; Tensile strain;
fLanguage
English
Journal_Title
Magnetics, IEEE Transactions on
Publisher
ieee
ISSN
0018-9464
Type
jour
DOI
10.1109/TMAG.1983.1062421
Filename
1062421
Link To Document