Title :
An integrated optic adiabatic TE/TM mode splitter on silicon
Author :
De Ridder, René M. ; Sander, A.F.M. ; Driessen, A. ; Fluitman, J.H.J.
Author_Institution :
MESA Res. Inst., Twente Univ., Enschede, Netherlands
fDate :
11/1/1993 12:00:00 AM
Abstract :
A compact integrated optic fundamental TE/TM mode splitter, based on the mode-sorting characteristics of an asymmetrical adiabatic Y junction of optical waveguides exhibiting shape birefringence, operating at 1550 nm, is designed, using the discrete sine method (DSM) and the beam propagation method (BPM). The structures are fabricated in a system of SiO2, SiOxNy, and Si3N 4 layers, using a low-temperature plasma-enhanced chemical-vapor deposition (PECVD) process, compatible with standard silicon IC processing
Keywords :
birefringence; integrated optics; optical communication equipment; optical waveguides; plasma CVD; 1550 nm; Si; Si3N4; Si3N4 layers; SiO2; SiOxNy; SiON; asymmetrical adiabatic Y junction; beam propagation method; discrete sine method; integrated optic adiabatic TE/TM mode splitter; integrated optic fundamental TE/TM mode splitter; low-temperature plasma-enhanced chemical-vapor deposition; mode-sorting characteristics; optical waveguides; shape birefringence; standard silicon IC processing; Birefringence; Integrated optics; Optical design; Optical propagation; Optical waveguides; Plasma chemistry; Shape; Silicon; Tellurium; Waveguide junctions;
Journal_Title :
Lightwave Technology, Journal of
