An integrated optic adiabatic TE/TM mode splitter on silicon

Author

De Ridder, René M. ; Sander, A.F.M. ; Driessen, A. ; Fluitman, J.H.J.

Author_Institution

MESA Res. Inst., Twente Univ., Enschede, Netherlands

Volume

11

Issue

11

fYear

1993

fDate

11/1/1993 12:00:00 AM

Firstpage

1806

Lastpage

1811

Abstract

A compact integrated optic fundamental TE/TM mode splitter, based on the mode-sorting characteristics of an asymmetrical adiabatic Y junction of optical waveguides exhibiting shape birefringence, operating at 1550 nm, is designed, using the discrete sine method (DSM) and the beam propagation method (BPM). The structures are fabricated in a system of SiO₂, SiO_xN_y, and Si₃N ₄ layers, using a low-temperature plasma-enhanced chemical-vapor deposition (PECVD) process, compatible with standard silicon IC processing

Keywords

birefringence; integrated optics; optical communication equipment; optical waveguides; plasma CVD; 1550 nm; Si; Si₃N₄; Si₃N₄ layers; SiO₂; SiO_xN_y; SiON; asymmetrical adiabatic Y junction; beam propagation method; discrete sine method; integrated optic adiabatic TE/TM mode splitter; integrated optic fundamental TE/TM mode splitter; low-temperature plasma-enhanced chemical-vapor deposition; mode-sorting characteristics; optical waveguides; shape birefringence; standard silicon IC processing; Birefringence; Integrated optics; Optical design; Optical propagation; Optical waveguides; Plasma chemistry; Shape; Silicon; Tellurium; Waveguide junctions;

fLanguage

English

Journal_Title

Lightwave Technology, Journal of

Publisher

ieee

ISSN

0733-8724

Type

jour

DOI

10.1109/50.251178

Filename

251178