Title :
Characteristics of Ti-indiffused waveguides in MgO-doped LiNbO3
Author_Institution :
Naval Research Laboratory, Washington, USA
Abstract :
Diffusion parameters are determined from prism coupler measurements on optical waveguides formed by Ti diffusion in LiNbO3 doped with 5% MgO. The diffusion coefficient is 3¿4 times smaller than for similar waveguides in undoped LiNbO3. The Ti depth profile is shown to be Gaussian by SIMS analysis.
Keywords :
diffusion in solids; doping profiles; lithium compounds; magnesium compounds; optical waveguides; secondary ion mass spectra; titanium; LiNbO3:MgO waveguides; SIMS analysis; Ti depth profile; Ti diffusion; diffusion coefficient; optical waveguides; prism coupler measurements;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19840613
