Analysis of multilayered periodic structures using generalized scattering matrix theory

The use of generalized scattering matrix theory is proposed as a fast, efficient approach for analyzing multilayer structures where in each layer is either a diffraction grating or a uniform dielectric slab, and all grating layers have the same periodicity. The overall scattering from the structure is determined by first evaluating a matrix of scattering parameters for each individual layer and then forming a scattering matrix for the entire structure by a procedure analogous to the cascading of networks in circuit theory. Higher-order spatial (Floquet) harmonics, including nonpropagating modes and cross-polarized fields, are taken into account as necessary. The approach is illustrated by computing the reflection coefficient of a multilayered resistive strip grating as a function of frequency