Two-dimensional simulation of inductive plasma sources with self-consistent power deposition

Author

Li, Ming ; Wu, Han-Ming ; Chen, Yunming

Author_Institution

Inst. of Mech., Chinese Academy of Sci., Beijing, China

Volume

23

Issue

4

fYear

1995

fDate

8/1/1995 12:00:00 AM

Firstpage

558

Lastpage

562

Abstract

A time averaged two-dimensional fluid model including an electromagnetic module with self-consistent power deposition was developed to simulate the transport of a low pressure radio frequency inductively coupled plasma source. Comparisons with experiment and previous simulation results show that the fluid model is feasible in a certain range of gas pressure. In addition, the effects of gas pressure and power input have been discussed

Keywords

discharges (electric); high-frequency discharges; plasma production; plasma simulation; simulation; electromagnetic module; fluid model; gas pressure; inductive plasma sources; low pressure radio frequency inductively coupled plasma source; power input; self-consistent power deposition; time averaged two-dimensional fluid model; two-dimensional simulation; Electromagnetic coupling; Electromagnetic induction; Electromagnetic modeling; Fault location; Plasma applications; Plasma density; Plasma simulation; Plasma sources; Plasma temperature; Plasma transport processes;

fLanguage

English

Journal_Title

Plasma Science, IEEE Transactions on

Publisher

ieee

ISSN

0093-3813

Type

jour

DOI

10.1109/27.467975

Filename

467975