Title :
Contact resistivity of IR lamp alloyed Au-Ge metallisation on GaAs
Author :
Gill, Sandeep Singh ; Dawsey, J.R. ; Cullis, A.G.
Author_Institution :
Royal Signals & Radar Establishment, Malvern, UK
Abstract :
A rapid infra-red (IR) lamp system used to alloy Au-Ge ohmic contacts to n-GaAs has yielded specific contact resistivity a factor of 3 lower than achieved by conventional graphite strip heater. In this initial study temperatures between 430 and 445°C and alloying times of 1 to 5 s have produced the best results.
Keywords :
contact resistance; germanium alloys; gold alloys; metallisation; ohmic contacts; 430°C to 445°C; Au-Ge; IR lamp; alloying times; contact resistivity; metallisation; n-GaAs; ohmic contacts;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19840642
