Title :
One-dimensional fluid model of ECR discharge with inhomogeneity effects of external magnetic field
Author :
Koon, S. ; Choi, Nak-Heon ; Park, Hyoung-Bin ; Choi, Duk-In
Author_Institution :
Dept. of Phys., Korea Adv. Inst. of Sci. & Technol., Taejon, South Korea
fDate :
8/1/1995 12:00:00 AM
Abstract :
A one-dimensional fluid model of the microwave electron cyclotron resonance (ECR) discharge, which includes the inhomogeneity effects of the external magnetic field, is developed. We use fluid equations which are obtained from the one-dimensional Bolzmann equation expressed in terms of magnetic moment and parallel velocity. We model the plasma and sheath separately, and appropriate plasma-sheath boundary conditions are utilized. Microwave is represented by an energy flow, and treated by a ray tracing technique. For the argon discharge, we obtain various quantities such as the axial profiles of plasma density, electron temperature, electrostatic potential, fluid velocity, and microwave power deposition. The results of simulation compare well with the experimental observation of the mirror field effects on the plasma parameters
Keywords :
argon; discharges (electric); high-frequency discharges; magnetic field effects; plasma density; plasma kinetic theory; plasma sheaths; plasma simulation; plasma temperature; simulation; Ar; Ar discharge; ECR discharge; electron temperature; electrostatic potential; energy flow; external magnetic field; fluid equations; fluid velocity; inhomogeneity effects; magnetic moment; microwave electron cyclotron resonance discharge; microwave power deposition; mirror field effects; one-dimensional Bolzmann equation; one-dimensional fluid model; plasma density; plasma-sheath boundary conditions; ray tracing technique; simulation; Cyclotrons; Electrons; Equations; Magnetic liquids; Magnetic moments; Magnetic resonance; Plasma density; Plasma sheaths; Plasma simulation; Plasma temperature;
Journal_Title :
Plasma Science, IEEE Transactions on