Title :
Kinetic model of a low-pressure N2-O2 flowing glow discharge
Author :
Gordiets, Boris F. ; Ferreira, Carlos M. ; Guerra, Vasco L. ; Loureiro, Jorge M A H ; Nahorny, Jacimar ; Pagnon, Daniel ; Touzeau, Michel ; Vialle, Marinette
Author_Institution :
Centro de Electrodinamica, Inst. Superior Tecnico, Lisbon, Portugal
fDate :
8/1/1995 12:00:00 AM
Abstract :
A self-consistent kinetic model is developed to study dc flowing glow discharges in N2/O2 mixtures. This model includes the calculation of electron energy distribution functions and electron rate coefficients coupled with detailed vibrational kinetics of N2 molecules, chemical kinetics taking into account a large set of neutral, excited and charged species, interaction of N and O atoms at the discharge tube wall, and the thermal balance of the discharge. The results of this model agree reasonably well with the measurements of the electronic density, the gas temperature, the reduced electric field, the vibrational temperature of N2 and the concentration of O, N atoms, NO molecules, N2(C), N2 +(B), and NO(γ) excited states. The comparison was performed in a N2-O2 discharge at pressure p=2 Torr, for discharge currents I=15, 30, and 80 mA, a flow rate Q=100 sccm, and O2 percentages ranging from 0 up to 100%,
Keywords :
glow discharges; nitrogen; oxygen; plasma; plasma collision processes; plasma flow; plasma kinetic theory; plasma-wall interactions; 15 mA; 2 torr; 30 mA; 80 mA; DC flowing glow discharges; N2-O2; charged species; chemical kinetics; discharge currents; discharge tube wall; electron energy distribution functions; electron rate coefficients; electronic density; excited species; excited states; flow rate; flowing glow discharge; gas temperature; low-pressure discharge; neutral species; reduced electric field; self-consistent kinetic model; thermal balance; vibrational kinetics; vibrational temperature; Atomic measurements; Chemicals; Density measurement; Distribution functions; Electric variables measurement; Electron tubes; Glow discharges; Kinetic theory; Temperature; Vibration measurement;
Journal_Title :
Plasma Science, IEEE Transactions on
