• DocumentCode
    996000
  • Title

    Response of a MEMS Microshutter Operating at 60 K to Ionizing Radiation

  • Author

    Buchner, S. ; Rapchun, David A. ; Moseley, Harvey ; Meyer, Stephen E. ; Oldham, Tim ; Ray, Knute ; Tuttle, Jim ; Quinn, Ed ; Buchanan, Ernie ; Bloom, Dave ; Hait, Tom ; Pearce, Mike ; Beamer, A.

  • Author_Institution
    Perot Syst., Seabrook
  • Volume
    54
  • Issue
    6
  • fYear
    2007
  • Firstpage
    2463
  • Lastpage
    2467
  • Abstract
    Total ionizing dose (TID) measurements at low temperature (60 K) of a micro-electro-mechanical system (MEMS) microshutter array (MSA) indicate that exposing the MSA to ionizing radiation causes some of the shutters to stop operating properly. The number of non-functional shutters depends on the applied bias. With increasing dose, the number of micro-shutters that become non-functional increases.
  • Keywords
    micromechanical devices; radiation effects; MEMS; applied bias; insulators; ionizing radiation effects; micro-electro-mechanical system; microshutter; temperature 60 K; Degradation; Infrared detectors; Infrared spectra; Ionizing radiation; Microelectromechanical systems; Micromechanical devices; NASA; Space technology; Telescopes; Temperature measurement; Insulators; low temperature; micro-electro-mechanical system; total ionizing dose;
  • fLanguage
    English
  • Journal_Title
    Nuclear Science, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9499
  • Type

    jour

  • DOI
    10.1109/TNS.2007.910040
  • Filename
    4395005
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=996000