Title :
New v-groove integrated injection logic
Author_Institution :
National Chiao Tung University, Department of Electronic Engineering, Hsinchu, Republic of China
Abstract :
A new V-groove integrated injection logic (v.i.i.l.) is proposed which combines the V-groove technology and the double-diffused bipolar technology. The fabrication processes arc qualitatively described. The lateral p¿n¿p transistor of the i.i.l. is located on the vertical V-shape surface, and the effective base width is controlled by the combination of the vertical diffusion process and the V-groove etching rate. A 1-dimensional analysis is used and an approximate expression for the collector current of the lateral p¿n¿p transistor is given. The v.i.i.l. is expected to have a higher production yield than that of the ordinary i.i.l.
Keywords :
bipolar integrated circuits; integrated circuit technology; integrated logic circuits; I2L; V-groove etching; V-groove integrated injection logic; base width; lateral p-n-p transistor; vertical diffusion process;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19770277