DocumentCode :
998790
Title :
Carrier profiling of InP
Author :
Lile, D.L. ; Collins, D.A.
Author_Institution :
Naval Ocean Systems Center, Electronic Material Sciences Division, San Diego, USA
Volume :
14
Issue :
15
fYear :
1978
Firstpage :
457
Lastpage :
458
Abstract :
A liquid barrier contact to InP is described which may be used for the routine evaluation of carrier profiles on even highly doped samples.
Keywords :
III-V semiconductors; carrier density; indium compounds; semiconductor-electrolyte boundaries; InP; InP electrolyte; carrier concentration; carrier profiles; liquid barrier contact;
fLanguage :
English
Journal_Title :
Electronics Letters
Publisher :
iet
ISSN :
0013-5194
Type :
jour
DOI :
10.1049/el:19780307
Filename :
4249467
Link To Document :
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