Title :
Design and calibration of a microfabricated floating-element shear-stress sensor
Author :
Schmidt, Martin A. ; Howe, Roger T. ; Senturia, Stephen D. ; Haritonidis, Joseph H.
Author_Institution :
MIT, Cambridge, MA, USA
fDate :
6/1/1988 12:00:00 AM
Abstract :
A microfabricated floating-element shear-stress sensor for measurements in turbulent boundary-layers is reported. Using surface micromachining of polyimide, a 500-μm×500-μm probe has been fabricated incorporating a differential-capacitor readout circuit. A model for the sensor response is described and is used for the design of an element to measure shear stresses of 1 Pa in air. The sensor is packaged for calibration in laminar flow, and electrical results obtained match the expected response
Keywords :
boundary layer turbulence; calibration; electric sensing devices; flow measurement; stress measurement; calibration; differential-capacitor readout circuit; laminar flow; microfabricated floating-element shear-stress sensor; polyimide; sensor response; shear stresses; surface micromachining; turbulent boundary-layers; Calibration; Force measurement; Force sensors; Heat transfer; Laboratories; Micromachining; Probes; Spatial resolution; Springs; Stress measurement;
Journal_Title :
Electron Devices, IEEE Transactions on
