• Record number
    11553
  • Title

    Atomic layer deposition for semiconductors

  • Publication
    New York Springer
  • Published Year
    2014
  • Fierst Pages
    x
  • Main Pages
    263
  • Collation
    x، 263، illus، tables، som col
  • Reprint
    False
  • Added entries
    AU ویراستار Hwang Cheol Seong
  • Editor
    Hwang Cheol Seong
  • Subject

    Semiconductors- Surfaces , Atomic layer deposition , Semiconductors- Surfaces

  • Class
    621
  • Number
    38152
  • CutterNumber
    A 79
  • ISBN
    978-1-4614-8053-2
  • Language
    انگليسي
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=7&DC=11553