Abstract :
We analyzed successfully the refractive index, n, and extinction coefficient, k, of three samples such as as-deposited singlephase
anatase–TiO2 polycrystalline thin films on slide glass substrates (#1), the sample surface-treated by N2–H2 mixed-gases
plasma (#2), and the sample being additionally anneal-treated in N2 gases (#3), by spectroscopic ellipsometry (SE). The doublelayered
film configuration named as the surface and the bulk layers is employed in SE analysis.
The optical properties of the surface layer are confirmed to be important to explain the significant red shift of the absorption
edge of both surface-treated samples observed in the preceding report. Particularly, the obtained imaginary part of complex
dielectric constant of the surface layer of the samples #2 and #3 shows significant difference from that of the sample #1. This is
due to the absorptive transitions not by solely anatase–TiO2 but by mixed formation of TiO2 xNx and TiN with metallic
characteristics.
Keywords :
SE , TiO2 , Complex refractive index , Complex dielectric constant , Thin film