Designable formation of metal nanoparticle array with the deposition of negatively charged nanoparticles

Ultrafine gold and platinum nanoparticles (NPs) were fabricated by pulsed laser ablation in helium gas and the NPs 2–15 nm in diameter were selectively classified by an electrostatic size-selection technique employing a low-pressure differential mobility analyzer (LP-DMA). The spherical NPs obtained showed a narrower distribution of diameters of anionic NPs over cationic NPs.With this knowledge, the anionic NPs were deposited onto silicon substrates designed by electron beam lithography processing, and designable patterns of arrayed NPs were produced by removing the photoresist layer