Title of article :
Band alignments at SrZrO3/Ge(0 0 1) interface: Thermal annealing effects
Author/Authors :
M. Yang، نويسنده , , W.S. Deng، نويسنده , , Q. Chen، نويسنده , , Y.P. Feng، نويسنده , , L.M. Wong، نويسنده , , J.W. Chai، نويسنده , , J.S. Pan، نويسنده , , S.J. Wang، نويسنده , , C.M. Ng، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2010
Pages :
4
From page :
4850
To page :
4853
Abstract :
High-image dielectrics SrZrO3 were prepared on Ge(0 0 1) substrate using pulse laser deposition, and band alignments and thermal annealing effects were studied with high resolution X-ray photoemission spectroscopy. Valence and conduction band offsets at this interface were measured to be 3.26 eV and 1.77 eV, respectively. Interfacial Ge oxide layers were found at the interface. After annealing at 600 imageC, the interfacial Ge oxide layers were eliminated, and the valence band offset increased to 3.50 eV, but the amorphous SrZrO3 became polycrystalline in the meantime.
Keywords :
High-? , Ge-FETs , Gate dielectrics
Journal title :
Applied Surface Science
Serial Year :
2010
Journal title :
Applied Surface Science
Record number :
1012778
Link To Document :
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