Title of article :
Self-assembling GaAs mirror with electrostatic actuation using micro-origami
Author/Authors :
T Fleischmann، نويسنده , , K Kubota، نويسنده , , P.O Vaccaro، نويسنده , , T.-S Wang، نويسنده , , S Saravanan، نويسنده , , N Saito، نويسنده ,
Issue Information :
دوهفته نامه با شماره پیاپی سال 2004
Abstract :
The fabrication of GaAs micro-mirrors with electrostatic actuation are fabricated using a strain-driven self-assembly mechanism. A mirror deflection of several degrees for driving voltages at 10 V was demonstrated and the dynamic response was investigated.
Keywords :
MEMS , Actuation , Self-assembly , GaAs , Micro-origami
Journal title :
Physica E Low-dimensional Systems and Nanostructures
Journal title :
Physica E Low-dimensional Systems and Nanostructures
