Title of article :
Surface analysis of nanomachined films using atomic force microscopy
Author/Authors :
Te-Hua Fang، نويسنده , , Win-Jin Chang، نويسنده , , Cheng-I Weng، نويسنده ,
Issue Information :
دوهفته نامه با شماره پیاپی سال 2005
Pages :
5
From page :
379
To page :
383
Abstract :
Surface analyses of nanomachined films are performed using atomic force microscopy. Both surface roughness and fractal dimension are the important factors in all areas of nanotribology and in evaluating the quality of a nanomachining operation. Nanomachining experiments are conducted to investigate the influence of the hardness of a material on the surface properties. Results indicate that the same load causes different depths of groove in the different materials studied (Ta, Pt). Rougher surfaces are produced by larger depths of groove. In addition, the fractal dimension increases as the load increases.
Keywords :
Fractal dimension , Roughness , Nanolithography , Nanomachining , atomic force microscopy
Journal title :
Materials Chemistry and Physics
Serial Year :
2005
Journal title :
Materials Chemistry and Physics
Record number :
1063547
Link To Document :
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