Microdisplacement characteristics and microstructures of functionally graded piezoelectric ceramic actuator

In this work, we report a functionally gradient piezoelectric ceramic actuator with sandwiched structure prepared by the powder metallurgical method. The functional gradients of piezoelectric activity and dielectric activity vary inversely across the thickness of the actuator. Such functional gradients are obtained by interdiffusion reaction between a high piezoelectric composition [Pb(Zr,Ti)O3/PZT] and a high dielectric composition (PbNi1/3Nb2/3O3/PNN). The bending displacement at the free end of the PNN/PZT functionally graded piezoelectric ceramic actuator was approximately 20 m when 1.4-kV/mm electric field was applied. The grain morphology and compositional distribution across the actuator section and the microstructures of the sandwiched layer were investigated by scanned electron microscopy equipped with energy-dispersive spectroscopy, transmission electron microscopy, and selected area electron diffraction patterns, respectively.