HBM and TLP ESD robustness in smart-power protection structures

In this paper we will present data concerning the ESD robustness of smart power protection structures (BCD technology) for input-output circuits. A comparison between the robustness of "p-body" and "p-well" based structures and a study of the influence of layout parameters on the ESD robustness will be given. The correlation between ESD robustness obtained with different test methods (HBM and TLP) will be also presented. © 1999 Elsevier Science Ltd. All rights reserved.