Abstract :
LiNbO3 and KTiOPO4 were implanted with 2.0 MeV Ni+ ions at several incident angles and a fluence of 8×1014 ions/cm2. The concentration profiles of implanted Ni+ were measured by secondary ion mass spectrometry (SIMS). The experimental Ni+ concentration profiles are compared with the Pearson IV and TRIM’90 (Transport of Ions in Matter 1990) simulations. The correlation between the profiles of Ni+ concentration and refractive index is discussed for LiNbO3 and KTiOPO4 waveguides.
