Performance of piezoelectrically actuated micropump with di erent driving voltage shapes and frequencies

The eects of driving voltage waveform and frequencies on the performance of a piezoelectrically actuated micropump are investigated in detail. A full threedimensional piezoelectric micropump was modeled numerically and tri electro-mechanical- uidic coupling eects have been taken into account on its interface boundaries. Standard excitation waveforms including sinusoidal, triangle, sawtooth and square shapes were implemented and the results were compared with each other. The real time pump ow behavior was studied in each case for dierent membrane positions. The analysis predicts that the more sharp jump in the wave form, the more pump ow can be attained at the outlet. Square shape excitation with the sharpest instantaneous slope has the most notable overall ow rate compared to the other types in the examined range of frequencies. The behavior can be explained by considering the generated vortices in the ow. Due to a sudden jump in membrane position, the ow forms strong vortices, which magnify the diodicty of the valves.