Internal structure of clusters of partially coherent nanocrystallites in Cr–Al–N and Cr–Al–Si–N coatings

Nano-sized clusters consisting of strongly preferentially oriented, partially coherent nanocrystallites were observed in Cr–Al–N and Cr–Al–Si–N coatings deposited using cathodic arc evaporation. Microstructure analysis of the coatings, which was done using the combination of X-ray diffraction (XRD) and transmission electron microscopy with high resolution (HRTEM), revealed furthermore stress-free lattice parameters, size and local disorientation of crystallites within the nano-sized clusters in dependence on the aluminium and silicon contents, mean size of these clusters and the kind of structure defects. Within the face-centred cubic (fcc) Cr1 − x − yAlxSiyN phase, the stress-free lattice parameter was described by the equation a = (0.41486 − 0.00827 · x + 0.034 · y) nm. The size of individual crystallites decreased from ∼ 11 nm in Cr0.92Al0.08N to ∼ 4 nm in Cr0.24Al0.65Si0.10N. These nanocrystallites formed clusters with the mean size between 36 and 56 nm. The mutual disorientation of the partially coherent nanocrystallites forming the clusters increased with increasing aluminium and silicon contents from 0.5° to several degrees. The disorientation of neighbouring nanocrystallites was explained by the presence of screw dislocations and by presence of phase interfaces in coatings containing a single fcc phase and several phases, respectively.