Title of article
Polysilanes as conducting material producers and their application to metal pattern formation by UV light and electroless metallization
Author/Authors
Fukushima، نويسنده , , Motoo and Noguchi، نويسنده , , Naoya and Aramata، نويسنده , , Mikio and Hamada، نويسنده , , Yoshitaka and Tabei، نويسنده , , Eiichi and Mori، نويسنده , , Shigeru and Yamamoto، نويسنده , , Yasushi، نويسنده ,
Issue Information
دوماهنامه با شماره پیاپی سال 1998
Pages
8
From page
273
To page
280
Abstract
This paper describes a novel method for the deposition of gold, silver and palladium colloids on polysilane films by reducing the corresponding metal salt dissolved in alcohol without the use of any other reductants, and an application of the methodology to the pattern formation of copper and nickel metal by palladium-catalyzed electroless metallization on the surface of poly(methylphenylsilane) film, in combination with UV light lithography at 254 nm without the use of any other photoresists.
Keywords
Electroless metallization , Conductivity , Metal salt doping , UV light lithography , Metal pattern formation , Polysilane
Journal title
Synthetic Metals
Serial Year
1998
Journal title
Synthetic Metals
Record number
2071947
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