Structural analysis of arc deposited diamond-like carbon films by Raman and X-ray photoelectron spectroscopy

Diamond-like carbon (DLC) films were deposited using metal arc under different experimental conditions. The ultra microhardness and load–displacement curves show that the typical hardness values of the deposited films range from 10 to 100 GPa. The detailed relationship between the sp3 structure and the D peak observed in the Raman spectra is investigated. For further studies, the C1s binding energy was determined employing X-ray photoelectron spectroscopy. Our results disclose that DLC films with very different sp3 structures may exhibit similar D Raman peaks.