Size selective filtration of silicon nano-structures using AFI AlPO4-5 zeolite pores

The ablation of Si has been carried out in the presence of ammonia ambient. Non-stoichiometric (silicon rich) silicon nitride composed of Si–Si, NHx (x=1,2) and SiHy (y=1–3) are formed. Photoluminescence at visible region based on these nano-structures was observed at room temperature. AlPO4-5 zeolite was used as substrate. It is shown that zeolite can selectively control the size of the Si nano-structure and the emission wavelength as well, and that the deposited SiN nano-structures can be migrated into the AlPO4-5 pores by annealing treatment. The photoluminescence red-shifted after annealing suggests that, the Si nano-crystals luminescence is ruled in the luminescence center. A theoretical model is proposed to explain the PL peak shift of the silicon nano-structures.