The annealing behavior of H13 steel implanted with molybdenum ions

H13 steel was implanted with molybdenum to a dose of 5 × 1017 ions cm−2 to investigate the annealing effect on the wear resistance of the implanted steel. The molybdenum ion implantation was done using a metal vapor vacuum arc (MEVVA) ion source. The annealing effect was examined by Rutherford backscattering spectroscopy (RBS), high voltage electron microscopy (HVEM) and grazing-angle X-ray diffraction (XRD). The experimental results have showed that the wear resistance of the implanted steel was not changed significantly by thermal anneal though annealing has made the amorphous layer, which was induced by Mo ion implantation, re-crystallize. The phenomena observed in the experiment are interpreted and the annealing effect on the wear resistance of Mo-implanted surface is discussed by collision theory.