Title of article
Increasing the Dynamic Range of a Micromechanical Moving-Plate Capacitor
Author/Authors
J. M. Kyyn?r?inen، نويسنده , , A. S. Oja and H. Sepp? ، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2001
Pages
10
From page
61
To page
70
Keywords
micromechanical capacitor , Electrostatic actuation
Journal title
Analog Integrated Circuits and Signal Processing
Serial Year
2001
Journal title
Analog Integrated Circuits and Signal Processing
Record number
367180
Link To Document