Title of article
System integration of high voltage electrostatic MEMS actuators
Author/Authors
Jean-François Saheb، نويسنده , , Jean-Francois Richard، نويسنده , , Mohamad Sawan، نويسنده , , Remi Meingan and Yvon Savaria ، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2007
Pages
8
From page
27
To page
34
Keywords
System integration . High Voltage CMOS .MEMS . DC/DC converter
Journal title
Analog Integrated Circuits and Signal Processing
Serial Year
2007
Journal title
Analog Integrated Circuits and Signal Processing
Record number
367807
Link To Document