Title of article :
Describing Hydrodynamic Particle Removal from Surfaces Using the Particle Reynolds Number
Author/Authors :
G.M. Burdick، نويسنده , , N.S. Berman ، نويسنده , , S.P. Beaudoin ، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2001
Pages :
13
From page :
453
To page :
465
Keywords :
chemical–mechanical planarization (CMP) , particle Reynolds number , hydrodynamic detachment , van der Waals forces , post-CMP cleaning , particle adhesion
Journal title :
Journal of Nanoparticle Research
Serial Year :
2001
Journal title :
Journal of Nanoparticle Research
Record number :
390052
Link To Document :
https://search.isc.ac/dl/search/defaultta.aspx?DTC=10&DC=390052
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